CMP Elite Z Synthetic
Mechanical Pump Fluid
Specifications:
Grade A Grade Z Vapor Pressure @ 25° C 1X10-7 Torr 1X10-7 Torr Viscosity @ 40° C. 48 cst. 55 cst. Pour Point -60 °C. -54 °C. Specific Gravity @ 22° C .83 g/ml .84 g/ml Flash Point - C.O.C. 249 °C. 480°F 268°C. 515°F Fire Point - C.O.C. 279 °C. 535°F 305°C. 581°F
CMP ELITE A and Z are two different viscosity versions of full synthetic hydrocarbon fluids which are double-distilled through a molecular distillation process. They have very low pour points to eliminate cold start problems and a very high viscosity index providing exceptional resistance to higher temperatures seen in many high rpm rotary vane pumps.
Their molecular structures are unique and provide excellent chemical inertness and high temperature stability. CMP ELITE fluids have a much higher molecular weight than petroleum oils and exhibit
greatly reduced backstreaming tendencies.
CMP ELITE fluids are miscible with hydrocarbon oils and do not require any special cleaning procedures before use.
CMP ELITE Z is the most popular choice of these two versions and can be used in all types of rotary vane pumps.
Typical applications include: Instrumentation, LPCVP, nitride deposition, ion implantation, plasma etching, sputtering and biomedical processes.
CAUTION : These products are not non-flammable and should not be used in applications where there is risk of explosion from high oxygen enriched environments.
